High-speed 3D imaging using two-wavelength parallel-phase-shift interferometry

High-speed three dimensional imaging based on twowavelength parallel-phase-shift interferometry is presented. The technique is demonstrated using a high-resolution polarization-based Linnik interferometer operating with three high-speed phase-masked CCD cameras and two quasi-monochromatic modulated light sources. The two light sources allow for phase unwrapping the single source wrapped phase so that relatively high step profiles having heights as large as 3.7 μm can be imaged in video rate with ±2 nm accuracy and repeatability. The technique is validated using a certified very large scale integration (VLSI) step standard followed by a demonstration from the semiconductor industry showing an integrated chip with 2.75 μm height copper micro pillars at different packing densities.