Full-field parallel interferometry coherence probe microscope for high-speed optical metrology

A. Safrani; I. Abdulhalim

doi:10.1364/AO.54.005083

Full-field parallel interferometry coherence probe microscope for high-speed optical metrology

Research output: Contribution to journal › Article › peer-review

Abstract

Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.

Original language	American English
Pages (from-to)	5083-5087
Number of pages	5
Journal	APPLIED OPTICS
Volume	54
Issue number	16
DOIs	https://doi.org/10.1364/AO.54.005083
State	Published - 1 Jun 2015

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.54.005083

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title = "Full-field parallel interferometry coherence probe microscope for high-speed optical metrology",

abstract = "Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.",

author = "A. Safrani and I. Abdulhalim",

note = "Publisher Copyright: {\textcopyright} 2015 Optical Society of America.",

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N2 - Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.

AB - Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.

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Full-field parallel interferometry coherence probe microscope for high-speed optical metrology

Abstract

All Science Journal Classification (ASJC) codes

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