Frequency Matching of Orthogonal Wineglass Modes in Disk and Ring Resonators Made from (100) Silicon

Eli Benvenisty; David Elata

doi:10.1109/LSENS.2019.2901129

Frequency Matching of Orthogonal Wineglass Modes in Disk and Ring Resonators Made from (100) Silicon

Eli Benvenisty, David Elata

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Vibrational wineglass modes in disk and rings that are made from (100) silicon are considered. It is shown that all odd-ordered wineglass modes are necessarily frequency matched, each with its orthogonal conjugate. In contrast, all even-ordered wineglass modes are likely not to be frequency matched with their orthogonal conjugate. Some specific cases are presented that show that many wineglass modes do not have a rotational periodic symmetry. This is relevant to disks and rings that are driven and sensed by surrounding gap-closing electrostatic actuators.

Original language	English
Article number	2501004
Journal	IEEE Sensors Letters
Volume	3
Issue number	3
DOIs	https://doi.org/10.1109/LSENS.2019.2901129
State	Published - Mar 2019

Keywords

Mechanical sensors, (100) silicon
cubic symmetry
disk resonator gyroscope (DRG)
mode matching
vibrating ring gyroscope (VRG)
wineglass modes

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Instrumentation

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10.1109/LSENS.2019.2901129

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title = "Frequency Matching of Orthogonal Wineglass Modes in Disk and Ring Resonators Made from (100) Silicon",

abstract = "Vibrational wineglass modes in disk and rings that are made from (100) silicon are considered. It is shown that all odd-ordered wineglass modes are necessarily frequency matched, each with its orthogonal conjugate. In contrast, all even-ordered wineglass modes are likely not to be frequency matched with their orthogonal conjugate. Some specific cases are presented that show that many wineglass modes do not have a rotational periodic symmetry. This is relevant to disks and rings that are driven and sensed by surrounding gap-closing electrostatic actuators.",

keywords = "Mechanical sensors, (100) silicon, cubic symmetry, disk resonator gyroscope (DRG), mode matching, vibrating ring gyroscope (VRG), wineglass modes",

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year = "2019",

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doi = "10.1109/LSENS.2019.2901129",

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N2 - Vibrational wineglass modes in disk and rings that are made from (100) silicon are considered. It is shown that all odd-ordered wineglass modes are necessarily frequency matched, each with its orthogonal conjugate. In contrast, all even-ordered wineglass modes are likely not to be frequency matched with their orthogonal conjugate. Some specific cases are presented that show that many wineglass modes do not have a rotational periodic symmetry. This is relevant to disks and rings that are driven and sensed by surrounding gap-closing electrostatic actuators.

AB - Vibrational wineglass modes in disk and rings that are made from (100) silicon are considered. It is shown that all odd-ordered wineglass modes are necessarily frequency matched, each with its orthogonal conjugate. In contrast, all even-ordered wineglass modes are likely not to be frequency matched with their orthogonal conjugate. Some specific cases are presented that show that many wineglass modes do not have a rotational periodic symmetry. This is relevant to disks and rings that are driven and sensed by surrounding gap-closing electrostatic actuators.

KW - Mechanical sensors, (100) silicon

KW - cubic symmetry

KW - disk resonator gyroscope (DRG)

KW - mode matching

KW - vibrating ring gyroscope (VRG)

KW - wineglass modes

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DO - 10.1109/LSENS.2019.2901129

M3 - مقالة

SN - 2475-1472

VL - 3

JO - IEEE Sensors Letters

JF - IEEE Sensors Letters

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M1 - 2501004

ER -

Frequency Matching of Orthogonal Wineglass Modes in Disk and Ring Resonators Made from (100) Silicon

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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