Frequency Matching of Orthogonal Wineglass Modes in Disk and Ring Resonators Made from (100) Silicon

Eli Benvenisty, David Elata

Research output: Contribution to journalArticlepeer-review

Abstract

Vibrational wineglass modes in disk and rings that are made from (100) silicon are considered. It is shown that all odd-ordered wineglass modes are necessarily frequency matched, each with its orthogonal conjugate. In contrast, all even-ordered wineglass modes are likely not to be frequency matched with their orthogonal conjugate. Some specific cases are presented that show that many wineglass modes do not have a rotational periodic symmetry. This is relevant to disks and rings that are driven and sensed by surrounding gap-closing electrostatic actuators.

Original languageEnglish
Article number2501004
JournalIEEE Sensors Letters
Volume3
Issue number3
DOIs
StatePublished - Mar 2019

Keywords

  • Mechanical sensors, (100) silicon
  • cubic symmetry
  • disk resonator gyroscope (DRG)
  • mode matching
  • vibrating ring gyroscope (VRG)
  • wineglass modes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Instrumentation

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