Fabrication of Nb/Al(AlOx)/Nb DC SQUID by focused ion beam sculpturing

D. Yuvaraj; Gil Bachar; Oren Suchoi; Oleg Shtempluck; Eyal Buks

Fabrication of Nb/Al(AlOx)/Nb DC SQUID by focused ion beam sculpturing

D. Yuvaraj, Gil Bachar, Oren Suchoi, Oleg Shtempluck, Eyal Buks

Electrical and Computer Engineering

Technion - Israel Institute of Technology

Research output: Working paper › Preprint

Abstract

Highly reproducible Nb/Al(AlOx)/Nb Josephson junction based direct current superconducting quantum interference devices (DC SQUID) were fabricated by three dimensional etching using focused ion beam. Hysteretic and non-hysteretic DC SQUID with critical current ranging from 25 to 1100 microampere were fabricated by varying the Al barrier and oxygen exposure time. The fabricated DC SQUIDs have shown periodic flux dependence with high modulation factor reaching a value of 92% at 4.2 K.

Original language	English
State	Published - 4 Jul 2011

Keywords

cond-mat.supr-con

Access to Document

1107.0635v1

Cite this

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title = "Fabrication of Nb/Al(AlOx)/Nb DC SQUID by focused ion beam sculpturing",

abstract = "Highly reproducible Nb/Al(AlOx)/Nb Josephson junction based direct current superconducting quantum interference devices (DC SQUID) were fabricated by three dimensional etching using focused ion beam. Hysteretic and non-hysteretic DC SQUID with critical current ranging from 25 to 1100 microampere were fabricated by varying the Al barrier and oxygen exposure time. The fabricated DC SQUIDs have shown periodic flux dependence with high modulation factor reaching a value of 92% at 4.2 K.",

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AU - Yuvaraj, D.

AU - Bachar, Gil

AU - Suchoi, Oren

AU - Shtempluck, Oleg

AU - Buks, Eyal

N1 - 3 pages, 4 figures

PY - 2011/7/4

Y1 - 2011/7/4

N2 - Highly reproducible Nb/Al(AlOx)/Nb Josephson junction based direct current superconducting quantum interference devices (DC SQUID) were fabricated by three dimensional etching using focused ion beam. Hysteretic and non-hysteretic DC SQUID with critical current ranging from 25 to 1100 microampere were fabricated by varying the Al barrier and oxygen exposure time. The fabricated DC SQUIDs have shown periodic flux dependence with high modulation factor reaching a value of 92% at 4.2 K.

AB - Highly reproducible Nb/Al(AlOx)/Nb Josephson junction based direct current superconducting quantum interference devices (DC SQUID) were fabricated by three dimensional etching using focused ion beam. Hysteretic and non-hysteretic DC SQUID with critical current ranging from 25 to 1100 microampere were fabricated by varying the Al barrier and oxygen exposure time. The fabricated DC SQUIDs have shown periodic flux dependence with high modulation factor reaching a value of 92% at 4.2 K.

KW - cond-mat.supr-con

M3 - نسخة اولية

BT - Fabrication of Nb/Al(AlOx)/Nb DC SQUID by focused ion beam sculpturing

ER -