Abstract
Temperature dependent capacitance-voltage (C-V) and conductance-voltage (G-V) measurements were performed to obtain activation energies (E A) for weak inversion C-V humps and parallel conductance peaks in Al 2O 3/InGaAs and Si 3N 4/InGaAs gate stacks. Values of 0.48 eV (slightly more than half of the band gap of the studied In 0.53Ga 0.47As) were obtained for E A of both phenomena for both gate dielectrics studied. This indicates an universal InGaAs behavior and shows that both phenomena are due to generation- recombination of minority carriers through near midgap located interface states. The C-V hump correlates with the interface states density (D it) and can be used as a characterization tool for dielectric/InGaAs systems.
| Original language | English |
|---|---|
| Article number | 173508 |
| Journal | Applied Physics Letters |
| Volume | 100 |
| Issue number | 17 |
| DOIs | |
| State | Published - 23 Apr 2012 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)