Embedded ultrasound sensor in a silicon-on-insulator photonic platform

Amir Rosenthal; Murad Omar; Héctor Estrada; Stephan Kellnberger; Daniel Razansky; Vasilis Ntziachristos

doi:https://doi.org/10.1063/1.4860983

Embedded ultrasound sensor in a silicon-on-insulator photonic platform

Amir Rosenthal, Murad Omar, Héctor Estrada, Stephan Kellnberger, Daniel Razansky, Vasilis Ntziachristos

Research output: Contribution to journal › Article › peer-review

Abstract

A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.

Original language	English
Article number	021116
Journal	Applied Physics Letters
Volume	104
Issue number	2
DOIs	https://doi.org/10.1063/1.4860983
State	Published - 13 Jan 2014
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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abstract = "A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.",

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AU - Omar, Murad

AU - Estrada, Héctor

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AU - Razansky, Daniel

AU - Ntziachristos, Vasilis

PY - 2014/1/13

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AB - A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.

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Embedded ultrasound sensor in a silicon-on-insulator photonic platform

Abstract

All Science Journal Classification (ASJC) codes

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