TY - JOUR
T1 - Effects of electron beam induced carbon deposition on the mechanical properties of a micromechanical oscillator
AU - Zaitsev, Stav
AU - Shtempluck, Oleg
AU - Buks, Eyal
N1 - Funding Information: The authors are grateful to O. Gottlieb and B. Bar On for helpful discussions. This work is supported by the German Israel Foundation under grant 1-2038.1114.07 , the Israel Science Foundation under grant 1380021 , the Deborah Foundation , Russell Berrie Nanotechnology Institute , the European STREP QNEMS Project and MAFAT .
PY - 2012/6
Y1 - 2012/6
N2 - Electron beam induced deposition of amorphous carbon finds several uses in microlithography, surface micromachining, and the manufacturing of micro- and nanomechanical devices. This process also occurs unintentionally in vacuum chambers of electron microscopes and interferes with normal image acquisition by reducing resolution and causing charging effects. In this work, we show that the resonance frequency of a micromechanical oscillator can be significantly affected by exposing it to a focused electron beam, which induces local carbonization on the surface of the oscillator, resulting in increase in the effective stress along the beam. This in-situ carbonization can be utilized for analyzing the amount of residual organic contamination in vacuum chambers. In addition, the method described here allows post-fabrication fine tuning of mechanical resonance frequencies of individual oscillating elements.
AB - Electron beam induced deposition of amorphous carbon finds several uses in microlithography, surface micromachining, and the manufacturing of micro- and nanomechanical devices. This process also occurs unintentionally in vacuum chambers of electron microscopes and interferes with normal image acquisition by reducing resolution and causing charging effects. In this work, we show that the resonance frequency of a micromechanical oscillator can be significantly affected by exposing it to a focused electron beam, which induces local carbonization on the surface of the oscillator, resulting in increase in the effective stress along the beam. This in-situ carbonization can be utilized for analyzing the amount of residual organic contamination in vacuum chambers. In addition, the method described here allows post-fabrication fine tuning of mechanical resonance frequencies of individual oscillating elements.
KW - Contamination sensor
KW - Electron beam carbonization
KW - Micromechanical resonator
KW - Surface tension
UR - http://www.scopus.com/inward/record.url?scp=84860358409&partnerID=8YFLogxK
U2 - https://doi.org/10.1016/j.sna.2012.02.039
DO - https://doi.org/10.1016/j.sna.2012.02.039
M3 - مقالة
SN - 0924-4247
VL - 179
SP - 237
EP - 241
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
ER -
