Dynamic trapping experiment in an elctrostaticlly actuated initially curved beam

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Abstract

We report on a first experimental demonstration of dynamic trapping of electrostatically actuated double clamped curved micro beam. The beam is configured in an isolated singular post-buckled configuration, showing enhanced gap usage which cannot be reached by either static or by a suddenly applied single step load. The trapping is achieved using a dynamic snap-through induced by a tailored two step time dependent electrostatic loading.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages784-787
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - 5 Aug 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • Bistability
  • Curved micro beam
  • Dynamic pull-in
  • Dynamic snap-through
  • Dynamic trapping
  • Electrostatic actuation
  • High speed camera
  • MEMS/NEMS
  • Pull-in

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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