Deposition and Characterization of NiTi Thin Films on Full Wafer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	American English
Title of host publication	International Conference on Shape Memory and Superelastic Technologies (SMST 2013)
Subtitle of host publication	Prague, Czech Republic, 20 - 24 May 2013
Publisher	Curran Associates Inc.
Pages	131-132
ISBN (Print)	9781634393195
State	Published - 2013

Cite this

@inproceedings{500a0eb238c844799e52cd4aacf989d6,

title = "Deposition and Characterization of NiTi Thin Films on Full Wafer",

author = "Meni Kabla and Doron Shilo",

note = "Abstracts",

year = "2013",

language = "American English",

isbn = "9781634393195",

pages = "131--132",

booktitle = "International Conference on Shape Memory and Superelastic Technologies (SMST 2013)",

publisher = "Curran Associates Inc.",

}