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DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC OPTICAL METROLOGY DEVICE

Amit Shachaf (Inventor), Pedro Vagos (Inventor), Michael Elad (Inventor)

Technion - Israel Institute of Technology

Research output: Patent

Original languageAmerican English
Patent numberEP3201608
IPCG01N 21/ 956 A I
Priority date23/09/15
StatePublished - 9 Aug 2017

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