CVD diamond metallization and characterization

D. Fraimovitch; A. Adelberd; S. Marunko; G. Lefeuvre; A. Ruzin

doi:10.1016/j.nima.2016.06.097

CVD diamond metallization and characterization

D. Fraimovitch, A. Adelberd, S. Marunko, G. Lefeuvre, A. Ruzin

School of Electrical Engineering

Tel Aviv University

Research output: Contribution to journal › Article › peer-review

Abstract

In this study we compared three diamond substrate grades: polycrystalline, optical grade single crystal, and electronic grade single crystal for detector application. Beside the bulk type, the choice of contact material, pre-treatment, and sputtering process details have shown to alter significantly the diamond detector performance. Characterization of diamond substrate permittivity and losses indicate grade and crystallinity related, characteristic differences for frequencies in 1 kHz–1 MHz range. Substantial grade related variations were also observed in surface electrostatic characterization performed by contact potential difference (CPD) mode of an atomic force microscope. Study of conductivity variations with temperature reveal that bulk trap energy levels are also dependent on the crystal grade.

Original language	English
Pages (from-to)	76-79
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	845
DOIs	https://doi.org/10.1016/j.nima.2016.06.097
State	Published - 11 Feb 2017

Keywords

AFM
Activation
CVD
Detector
Diamond
Radiation

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/j.nima.2016.06.097

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title = "CVD diamond metallization and characterization",

abstract = "In this study we compared three diamond substrate grades: polycrystalline, optical grade single crystal, and electronic grade single crystal for detector application. Beside the bulk type, the choice of contact material, pre-treatment, and sputtering process details have shown to alter significantly the diamond detector performance. Characterization of diamond substrate permittivity and losses indicate grade and crystallinity related, characteristic differences for frequencies in 1 kHz–1 MHz range. Substantial grade related variations were also observed in surface electrostatic characterization performed by contact potential difference (CPD) mode of an atomic force microscope. Study of conductivity variations with temperature reveal that bulk trap energy levels are also dependent on the crystal grade.",

keywords = "AFM, Activation, CVD, Detector, Diamond, Radiation",

author = "D. Fraimovitch and A. Adelberd and S. Marunko and G. Lefeuvre and A. Ruzin",

note = "Publisher Copyright: {\textcopyright} 2016 Elsevier B.V.",

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TY - JOUR

T1 - CVD diamond metallization and characterization

AU - Fraimovitch, D.

AU - Adelberd, A.

AU - Marunko, S.

AU - Lefeuvre, G.

AU - Ruzin, A.

PY - 2017/2/11

Y1 - 2017/2/11

N2 - In this study we compared three diamond substrate grades: polycrystalline, optical grade single crystal, and electronic grade single crystal for detector application. Beside the bulk type, the choice of contact material, pre-treatment, and sputtering process details have shown to alter significantly the diamond detector performance. Characterization of diamond substrate permittivity and losses indicate grade and crystallinity related, characteristic differences for frequencies in 1 kHz–1 MHz range. Substantial grade related variations were also observed in surface electrostatic characterization performed by contact potential difference (CPD) mode of an atomic force microscope. Study of conductivity variations with temperature reveal that bulk trap energy levels are also dependent on the crystal grade.

AB - In this study we compared three diamond substrate grades: polycrystalline, optical grade single crystal, and electronic grade single crystal for detector application. Beside the bulk type, the choice of contact material, pre-treatment, and sputtering process details have shown to alter significantly the diamond detector performance. Characterization of diamond substrate permittivity and losses indicate grade and crystallinity related, characteristic differences for frequencies in 1 kHz–1 MHz range. Substantial grade related variations were also observed in surface electrostatic characterization performed by contact potential difference (CPD) mode of an atomic force microscope. Study of conductivity variations with temperature reveal that bulk trap energy levels are also dependent on the crystal grade.

KW - AFM

KW - Activation

KW - CVD

KW - Detector

KW - Diamond

KW - Radiation

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U2 - 10.1016/j.nima.2016.06.097

DO - 10.1016/j.nima.2016.06.097

M3 - مقالة

SN - 0168-9002

VL - 845

SP - 76

EP - 79

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

ER -

CVD diamond metallization and characterization

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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