Contact engineering in vertical hybrid field effect transistor

Gil Sheleg, Nir Tessler

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Here we report a Vertical Hybrid Field Effect Transistor (VHFET) that shows an improved saturated output characteristics. Up till today the injection limited regime in vertical transistor was realized using an injection barrier as well as a buried semiconductor (SC) under the source contact. Using previous reported simulations and a new fabrication technique we successfully fabricated and characterized a functional device which operates at the injection limited regime without the need of a current limited source injection barrier. The new architecture shows better gate control with 5 ™ 105 on/off ratio and 240 mV/dec subthreshold swing. Furthermore, we can set design rules for the vertical source contact to enable high performance Vertical Field Effect Transistors (VFET), some of which are applicable to any short-channel transistor.

Original languageEnglish
Title of host publicationOrganic and Hybrid Field-Effect Transistors XIX
EditorsIain McCulloch, Oana D. Jurchescu
ISBN (Electronic)9781510637580
DOIs
StatePublished - 2020
EventOrganic and Hybrid Field-Effect Transistors XIX 2020 - Virtual, Online, United States
Duration: 24 Aug 20204 Sep 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11476

Conference

ConferenceOrganic and Hybrid Field-Effect Transistors XIX 2020
Country/TerritoryUnited States
CityVirtual, Online
Period24/08/204/09/20

Keywords

  • Amorphous Metal Oxide
  • Contact engineering
  • IGZO
  • Organic material
  • Thin Film Transistor
  • Vertical Hybrid Field Effect Transistor
  • low-cost high-performance

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Applied Mathematics
  • Electrical and Electronic Engineering
  • Computer Science Applications

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