Collective dynamics and pattern switching in an array of parametrically excited micro cantilevers interacting through fringing electrostatic fields

Slava Krylov, Stella Lulinsky, B. Robert Ilic, Inbar Schneider

Research output: Contribution to journalArticlepeer-review

Abstract

We report on an experimental observation of synchronization and abrupt transitions between standing wave patterns in arrays of micromechanical oscillators. The architecture of flexible cantilever arrays parametrically excited by and interacting through time-dependent fringing electrostatic fields allows tuning of an interaction potential and supports traveling waves. The arrays consisting of 500 μm long and 5 μm thick single crystal Si cantilevers were fabricated from silicon on insulator substrates. The out-of-plane resonant responses were visualized by time-averaged temporally aliased video imaging and measured by laser Doppler vibrometry. Our experimental and reduced order model results collectively demonstrate that under a slowly varying drive frequency the standing wave patterns remain unchanged in certain frequencies intervals, followed by an abrupt change in the pattern.

Original languageEnglish
Article number071909
JournalApplied Physics Letters
Volume105
Issue number7
DOIs
StatePublished - 18 Aug 2014

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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