Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension

Erez Benjamin; Ronen Maimon; Slava Krylov

doi:10.1109/LSENS.2023.3312994

Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension

Erez Benjamin, Ronen Maimon, Slava Krylov

School of Mechanical Engineering

Tel Aviv University

Research output: Contribution to journal › Article › peer-review

Abstract

In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.

Original language	English
Article number	2503904
Journal	IEEE Sensors Letters
Volume	7
Issue number	10
DOIs	https://doi.org/10.1109/LSENS.2023.3312994
State	Published - 1 Oct 2023

Keywords

Mechanical sensors
bistability
compliant suspension
microelectromechanical system (MEMS)
rotational actuator
sensor applications

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

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10.1109/LSENS.2023.3312994

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title = "Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension",

abstract = "In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.",

keywords = "Mechanical sensors, bistability, compliant suspension, microelectromechanical system (MEMS), rotational actuator, sensor applications",

author = "Erez Benjamin and Ronen Maimon and Slava Krylov",

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year = "2023",

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doi = "10.1109/LSENS.2023.3312994",

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N2 - In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.

AB - In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.

KW - Mechanical sensors

KW - bistability

KW - compliant suspension

KW - microelectromechanical system (MEMS)

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KW - sensor applications

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JO - IEEE Sensors Letters

JF - IEEE Sensors Letters

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M1 - 2503904

ER -

Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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