An ideal MEMS parametric resonator using a tapered comb-drive

Shai Shmulevich; Inbar Hotzen; David Elata

doi:10.1016/j.proeng.2014.11.738

An ideal MEMS parametric resonator using a tapered comb-drive

Shai Shmulevich, Inbar Hotzen, David Elata

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

We present an ideal MEMS parametric resonator. The resonator is ideal in the sense that it is driven by modulation of a linear stiffness. The resonator is based on an electrostatic anti-spring which only effects stiffness, and in contrast to previous transducers, does not induce any other linear or nonlinear force. The significance of this work is that it allows, for the first time, to experimentally explore classic parametric resonators such as described by the Meissner equation. We present experimental results showing parametric excitation of a Meissner resonator, and characterization of the first unstable region of its stability map.

Original language	English
Pages (from-to)	1481-1484
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.738
State	Published - 2014
Event	28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: 7 Sep 2014 → 10 Sep 2014

Keywords

Electrostatic actuators
Nonlinear systems
Parametric resonator
Tapered comb-drive

All Science Journal Classification (ASJC) codes

General Engineering

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10.1016/j.proeng.2014.11.738

Cite this

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title = "An ideal MEMS parametric resonator using a tapered comb-drive",

abstract = "We present an ideal MEMS parametric resonator. The resonator is ideal in the sense that it is driven by modulation of a linear stiffness. The resonator is based on an electrostatic anti-spring which only effects stiffness, and in contrast to previous transducers, does not induce any other linear or nonlinear force. The significance of this work is that it allows, for the first time, to experimentally explore classic parametric resonators such as described by the Meissner equation. We present experimental results showing parametric excitation of a Meissner resonator, and characterization of the first unstable region of its stability map.",

keywords = "Electrostatic actuators, Nonlinear systems, Parametric resonator, Tapered comb-drive",

author = "Shai Shmulevich and Inbar Hotzen and David Elata",

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T1 - An ideal MEMS parametric resonator using a tapered comb-drive

AU - Shmulevich, Shai

AU - Hotzen, Inbar

AU - Elata, David

PY - 2014

Y1 - 2014

N2 - We present an ideal MEMS parametric resonator. The resonator is ideal in the sense that it is driven by modulation of a linear stiffness. The resonator is based on an electrostatic anti-spring which only effects stiffness, and in contrast to previous transducers, does not induce any other linear or nonlinear force. The significance of this work is that it allows, for the first time, to experimentally explore classic parametric resonators such as described by the Meissner equation. We present experimental results showing parametric excitation of a Meissner resonator, and characterization of the first unstable region of its stability map.

AB - We present an ideal MEMS parametric resonator. The resonator is ideal in the sense that it is driven by modulation of a linear stiffness. The resonator is based on an electrostatic anti-spring which only effects stiffness, and in contrast to previous transducers, does not induce any other linear or nonlinear force. The significance of this work is that it allows, for the first time, to experimentally explore classic parametric resonators such as described by the Meissner equation. We present experimental results showing parametric excitation of a Meissner resonator, and characterization of the first unstable region of its stability map.

KW - Electrostatic actuators

KW - Nonlinear systems

KW - Parametric resonator

KW - Tapered comb-drive

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U2 - 10.1016/j.proeng.2014.11.738

DO - 10.1016/j.proeng.2014.11.738

M3 - مقالة من مؤنمر

SN - 1877-7058

VL - 87

SP - 1481

EP - 1484

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 28th European Conference on Solid-State Transducers, EUROSENSORS 2014

Y2 - 7 September 2014 through 10 September 2014

ER -

An ideal MEMS parametric resonator using a tapered comb-drive

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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