An Epi-Seal Encapsulated Franklin Oscillator Sustaining More Than 200,000,000 Electric Switching Cycles

Danny A. Kassie, Ian B. Flader, Shai Shmulevich, Hyun Keun Kwon, Thomas W. Kenny, David Elata

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

For the first time ever, we demonstrate an Epi-Seal encapsulated, self-excited Franklin oscillator. This electromechanical switch oscillator, is driven by a constant input of 3.8 [V], sustains self-oscillations at a frequency of 88.6 [kHz], and requires a power of only 1.5 [mu mathrm{W} {mathrm{RMS}}]. We demonstrate over 200 million switching cycles, with two events of contact/charge transfer in each cycle. We demonstrate that a high mechanical restoring force is crucial for long-term reliability of switch oscillators. Furthermore, we implement a new driving scheme that further increases the long-term reliability. The relevance of this device is its potential as a new concept for a low cost, low power, wafer level MEMS oscillator.

Original languageEnglish
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Pages230-233
Number of pages4
ISBN (Electronic)9781728135809
DOIs
StatePublished - Jan 2020
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: 18 Jan 202022 Jan 2020

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/TerritoryCanada
CityVancouver
Period18/01/2022/01/20

Keywords

  • Franklin oscillator
  • Oscillator
  • Startup pulse
  • Switching

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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