Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording

Engineering & Materials Science

• Amorphous silicon 85%
• Microelectrodes 83%
• Silicon carbide 67%
• Electrodes 35%
• Coatings 11%
• Acoustic impedance 11%
• Charge injection 11%
• Plasma enhanced chemical vapor deposition 11%
• Electrochemical properties 10%
• Rats 9%
• Phosphates 8%
• Encapsulation 8%
• Animals 7%
• Thin films 7%
• Semiconductor materials 6%
• Tissue 6%
• Silicon 6%
• Geometry 4%

Medicine & Life Sciences

• silicon carbide 100%
• Microelectrodes 70%
• Electrodes 40%
• Foreign Bodies 16%
• Basal Ganglia 16%
• Electric Impedance 15%
• Equipment and Supplies 14%
• Finches 11%
• Semiconductors 11%
• Equidae 9%
• Silicon 9%
• Motor Cortex 7%
• Phosphates 6%
• Technology 5%
• Injections 4%
• Animals 3%