A pure-twisting piezoelectric actuator for tilting micromirror applications

Inbar Grinberg, Nadav Maccabi, David Elata

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present a piezoelectric twisting actuator for tilting micromirror applications. The actuator is made of two inline bulk piezoelectric beams, which are directly driven in a pure twisting mode. This is in contrast to existing piezoelectric devices, in which bending must be converted to tilting motion. Proof-of-concept devices were fabricated from single layer of bulk PZT, which was machined using a cheap and simple sand-blasting process. Interdigitated electrodes, oriented at 45° to the beam axis, were deposited on the top and bottom surfaces of the beams, and they are used for both poling and driving. The quasi-static and resonance responses are experimentally measured.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2035-2038
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Piezoelectric actuation
  • bulk PZT
  • interdigitated electrodes
  • pure torsion
  • tilting micromirror

All Science Journal Classification (ASJC) codes

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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