@inproceedings{55d1958c4203471686f78f25394ce46a,
title = "A pure-twisting piezoelectric actuator for tilting micromirror applications",
abstract = "We present a piezoelectric twisting actuator for tilting micromirror applications. The actuator is made of two inline bulk piezoelectric beams, which are directly driven in a pure twisting mode. This is in contrast to existing piezoelectric devices, in which bending must be converted to tilting motion. Proof-of-concept devices were fabricated from single layer of bulk PZT, which was machined using a cheap and simple sand-blasting process. Interdigitated electrodes, oriented at 45° to the beam axis, were deposited on the top and bottom surfaces of the beams, and they are used for both poling and driving. The quasi-static and resonance responses are experimentally measured.",
keywords = "Piezoelectric actuation, bulk PZT, interdigitated electrodes, pure torsion, tilting micromirror",
author = "Inbar Grinberg and Nadav Maccabi and David Elata",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "https://doi.org/10.1109/TRANSDUCERS.2017.7994472",
language = "الإنجليزيّة",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "2035--2038",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
}