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A process for electroplating of copper

  • Yair Ein-Eli (Inventor)
  • , Nina Sezin (Inventor)
  • , David Starosvetsky (Inventor)

Research output: Patent

Abstract

A process for electroplating high adhesion copper layer on a surface of a highly oxidizable metal in an invariable container, and products produced by this process are provided.

Original languageAmerican English
Patent numberCN102395712
IPCH01L 23/ 532 A I
Priority date11/02/10
StatePublished - 28 Mar 2012

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