A piezoelectric beam actuator with a pure twisting response

Inbar Grinberg; Nadav Maccabi; Adne Kassie; David Elata

doi:10.1109/MEMSYS.2017.7863518

A piezoelectric beam actuator with a pure twisting response

Inbar Grinberg, Nadav Maccabi, Adne Kassie, David Elata

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present for the first time ever, a piezoelectric beam actuator that can be directly driven in pure torsion. The beam actuator is designed with interdigitated electrodes (IDEs), on both its top and bottom surfaces. The IDEs are used for both poling and driving. When the IDEs are driven by a voltage with the same polarity as used for poling, they induce a combination of shear and expansion strains, close to the top and bottom surfaces. The expansion strains at the top and bottom surfaces are similar, and hence they produce no net bending. However, the shear strains at the top and bottom surfaces are in opposite directions, and they produce a pure twist. If the IDEs on the top and bottom surfaces are driven by the same voltage but in opposite polarity, then a pure bending response is produced. We experimentally demonstrate that the actuator can be driven in either pure torsion or in pure bending, with negligible cross-coupling.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Pages	757-760
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863518
State	Published - 23 Feb 2017
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863518

Cite this

Grinberg, I., Maccabi, N., Kassie, A., & Elata, D. (2017). A piezoelectric beam actuator with a pure twisting response. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 757-760). Article 7863518 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2017.7863518

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title = "A piezoelectric beam actuator with a pure twisting response",

abstract = "We present for the first time ever, a piezoelectric beam actuator that can be directly driven in pure torsion. The beam actuator is designed with interdigitated electrodes (IDEs), on both its top and bottom surfaces. The IDEs are used for both poling and driving. When the IDEs are driven by a voltage with the same polarity as used for poling, they induce a combination of shear and expansion strains, close to the top and bottom surfaces. The expansion strains at the top and bottom surfaces are similar, and hence they produce no net bending. However, the shear strains at the top and bottom surfaces are in opposite directions, and they produce a pure twist. If the IDEs on the top and bottom surfaces are driven by the same voltage but in opposite polarity, then a pure bending response is produced. We experimentally demonstrate that the actuator can be driven in either pure torsion or in pure bending, with negligible cross-coupling.",

author = "Inbar Grinberg and Nadav Maccabi and Adne Kassie and David Elata",

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Grinberg, I, Maccabi, N, Kassie, A & Elata, D 2017, A piezoelectric beam actuator with a pure twisting response. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863518, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 757-760, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863518

A piezoelectric beam actuator with a pure twisting response. / Grinberg, Inbar; Maccabi, Nadav; Kassie, Adne et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. 2017. p. 757-760 7863518 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A piezoelectric beam actuator with a pure twisting response

AU - Grinberg, Inbar

AU - Maccabi, Nadav

AU - Kassie, Adne

AU - Elata, David

PY - 2017/2/23

Y1 - 2017/2/23

N2 - We present for the first time ever, a piezoelectric beam actuator that can be directly driven in pure torsion. The beam actuator is designed with interdigitated electrodes (IDEs), on both its top and bottom surfaces. The IDEs are used for both poling and driving. When the IDEs are driven by a voltage with the same polarity as used for poling, they induce a combination of shear and expansion strains, close to the top and bottom surfaces. The expansion strains at the top and bottom surfaces are similar, and hence they produce no net bending. However, the shear strains at the top and bottom surfaces are in opposite directions, and they produce a pure twist. If the IDEs on the top and bottom surfaces are driven by the same voltage but in opposite polarity, then a pure bending response is produced. We experimentally demonstrate that the actuator can be driven in either pure torsion or in pure bending, with negligible cross-coupling.

AB - We present for the first time ever, a piezoelectric beam actuator that can be directly driven in pure torsion. The beam actuator is designed with interdigitated electrodes (IDEs), on both its top and bottom surfaces. The IDEs are used for both poling and driving. When the IDEs are driven by a voltage with the same polarity as used for poling, they induce a combination of shear and expansion strains, close to the top and bottom surfaces. The expansion strains at the top and bottom surfaces are similar, and hence they produce no net bending. However, the shear strains at the top and bottom surfaces are in opposite directions, and they produce a pure twist. If the IDEs on the top and bottom surfaces are driven by the same voltage but in opposite polarity, then a pure bending response is produced. We experimentally demonstrate that the actuator can be driven in either pure torsion or in pure bending, with negligible cross-coupling.

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M3 - منشور من مؤتمر

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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ER -

A piezoelectric beam actuator with a pure twisting response

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