Abstract
This paper describes a novel concept for in-plane actuators based on a thin free-standing shape memory alloy (SMA) film. The presented guidelines can be used to design a variety of actuators that can provide a combination of large strokes and forces for linear and rotary motions. A prototype actuator demonstrated a displacement of 45 μm related to 4.5% of the SMA film length, and a force of up to 115 mN related to a stress of 230 MPa in the SMA film without plastic deformations. These capabilities allow the actuator to work against the stiff springs that are essential for the devices' ability to sustain vibrations, impacts, and accelerations.
| Original language | English |
|---|---|
| Article number | 075020 |
| Journal | Smart Materials and Structures |
| Volume | 25 |
| Issue number | 7 |
| DOIs | |
| State | Published - 1 Jun 2016 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 3 Good Health and Well-being
Keywords
- MEMS
- NiTi
- SMA
- actuator
- sputtering
- thin film
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Mechanics of Materials
- Signal Processing
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
- General Materials Science
- Civil and Structural Engineering
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