A novel dynamic process control scheme to improve cycle time in Fabs

Michael Hassoun

doi:10.1109/TSM.2016.2617895

A novel dynamic process control scheme to improve cycle time in Fabs

Michael Hassoun

Department of Industrial Engineering and Management

Ariel University

Research output: Contribution to journal › Article › peer-review

Abstract

Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.

Original language	English
Article number	7592402
Pages (from-to)	32-38
Number of pages	7
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	30
Issue number	1
DOIs	https://doi.org/10.1109/TSM.2016.2617895
State	Published - 1 Feb 2017

Keywords

Semiconductor manufacturing
metrology
statistical process control

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/TSM.2016.2617895

Cite this

@article{3686790845194fe68200c6fc9f2a653c,

title = "A novel dynamic process control scheme to improve cycle time in Fabs",

abstract = "Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.",

keywords = "Semiconductor manufacturing, metrology, statistical process control",

author = "Michael Hassoun",

note = "Publisher Copyright: {\textcopyright} 1988-2012 IEEE.",

year = "2017",

month = feb,

day = "1",

doi = "10.1109/TSM.2016.2617895",

language = "الإنجليزيّة",

volume = "30",

pages = "32--38",

journal = "IEEE Transactions on Semiconductor Manufacturing",

issn = "0894-6507",

number = "1",

}

TY - JOUR

T1 - A novel dynamic process control scheme to improve cycle time in Fabs

AU - Hassoun, Michael

PY - 2017/2/1

Y1 - 2017/2/1

N2 - Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.

AB - Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.

KW - Semiconductor manufacturing

KW - metrology

KW - statistical process control

UR - http://www.scopus.com/inward/record.url?scp=85012872869&partnerID=8YFLogxK

U2 - 10.1109/TSM.2016.2617895

DO - 10.1109/TSM.2016.2617895

M3 - مقالة

SN - 0894-6507

VL - 30

SP - 32

EP - 38

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

IS - 1

M1 - 7592402

ER -

A novel dynamic process control scheme to improve cycle time in Fabs

Abstract

Keywords

All Science Journal Classification (ASJC) codes

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this