A MEMS Implementation of a Classic Parametric Resonator

Shai Shmulevich, Inbar Grinberg, David Elata

Research output: Contribution to journalArticlepeer-review

Abstract

We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric excitation. This model predicts the minimal modulation amplitude required to obtain an unbounded response in a parametric system with linear damping. We show experimental results in which the system is operated as a Meissner resonator.

Original languageEnglish
Article number7050236
Pages (from-to)1285-1292
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume24
Issue number5
DOIs
StatePublished - Oct 2015

Keywords

  • Electrostatic actuators
  • parametric excitation
  • parametric resonators
  • tapered comb-drive

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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