Abstract
We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric excitation. This model predicts the minimal modulation amplitude required to obtain an unbounded response in a parametric system with linear damping. We show experimental results in which the system is operated as a Meissner resonator.
| Original language | English |
|---|---|
| Article number | 7050236 |
| Pages (from-to) | 1285-1292 |
| Number of pages | 8 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 24 |
| Issue number | 5 |
| DOIs | |
| State | Published - Oct 2015 |
Keywords
- Electrostatic actuators
- parametric excitation
- parametric resonators
- tapered comb-drive
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
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