@inproceedings{e220b063aca744e39d8b8d469e586bcb,
title = "A gap-closing electrostatic actuator with a linear extended range",
abstract = "We present for the first time a gap-closing electrostatic actuator with a linear extended range. We achieve this by designing a nonlinear spring which exactly counteracts the nonlinear effects of electrostatic attraction forces in gap-closing actuators. We demonstrate this on test devices with an initial gap of g=22μ. The initial response up to a deflection of g/4 is stable and is inevitably nonlinear, but beyond this point we demonstrate good linearity up to a displacement of 85% of the nominal gap.",
keywords = "Electrostatic actuators, extended range, gap-closing, linear response, nonlinear springs",
author = "Ben Rivlin and Shai Shmulevich and Inbar Hotzen and David Elata",
year = "2013",
doi = "10.1109/Transducers.2013.6626833",
language = "الإنجليزيّة",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "582--585",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}