@inproceedings{156ca9c78b3540c48ac99f1544ce5cb9,
title = "A bulk-unimorph PZT actuator for large piston motions with 2-axis small angle adjustments",
abstract = "We present a bulk-unimorph PZT actuator that can achieve large piston motions, and small angle adjustments. The actuator is constructed from four spiral arms supporting a central stage, and each arm can be actuated separately. The spiral arms are driven by both internal bending moments and torsion moments. We experimentally show that the torsional deformation in the arms dominates the response, and that the internal bending moments have a negligible effect. The presented device achieves a piston motion of up to 75μm, and small tilting angles around two perpendicular in-plane axes.",
keywords = "Piezoelectric actuation, bulk PZT, interdigitated electrodes, piston motion, spiral arms, tilting micromirror",
author = "Inbar Grinberg and Nadav Maccabi and David Elata",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994468",
language = "الإنجليزيّة",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "2019--2022",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
}