3D Integrated Photonics based on Fast Sol-gel Technology and Soft Nano Imprint Lithography

Ofer Bar-On, Philipp Brenner, Raz Gvishi, Tobias Siegle, Heinz Kalt, Uli Lemmer, Jacob Scheuer

Research output: Contribution to journalConference articlepeer-review

Abstract

In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.

Original languageEnglish
Article numberNoTh1C.5
JournalOptics InfoBase Conference Papers
StatePublished - 2017
EventNovel Optical Materials and Applications, NOMA 2017 - New Orleans, United States
Duration: 24 Jul 201727 Jul 2017

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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